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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CMII2

High Uniformity, Stability, and Reliability Large-Format InGaAs APD Arrays

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Abstract

The characteristics of both etched mesa and guard ring type of InGaAs APD arrays were compared. High uniformity, high stability, and high reliability guard-ring type of arrays with a size up to 64×64 were fabricated.

© 2007 Optical Society of America

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