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Conferences > CLEO > 2007 > CMO > CMO3
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CMO3

InGaN/GaN MQW Nanorods LED Fabricated by ICP-RIE and PEC Oxidation Processes

Fang-I Lai, H. W. Huang, Ching-Hua Chiu, C. F. Lai, T.C. Lu, H.C. Kuo, and S.C. Wang

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Abstract

The InGaN/GaN nanorods LED was successfully fabricated by ICP-RIE and PEC processes. Compared with as-grown sample, the PL and EL peak-wavelengths of the nanorods with PEC show 8.6 and 10.5 nm blue-shift, respectively.

© 2007 Optical Society of America

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