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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 6, 2007
ISBN: 1557528349
Lasers and Laser Materials (CMW)

Low-Loss Al2O3 Waveguides for Active Integrated Optics

Kerstin Worhoff, Jonathan DB. Bradley, Feridun Ay, and Markus Pollnau

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Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.

© 2007 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3130) Integrated optics : Integrated optics materials
(160.0160) Materials : Materials
(160.4670) Materials : Optical materials

K. Worhoff, J. D. Bradley, F. Ay, and M. Pollnau, "Low-Loss Al2O3 Waveguides for Active Integrated Optics," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper CMW5.

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