OSA's Digital Library

Optics InfoBase > Conference Papers > CLEO > 2007 > CThCC > Page CThCC3 © 2007 OSA

Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 6, 2007
ISBN: 1557528349
Laser Processing and Measurements (CThCC)

Arrays of Sub-100 nm Features Fabricated with Table Top Extreme Ultraviolet Interferometric Laser Lithography

Przemyslaw W. Wachulak, Maria G. Capeluto, Mario C. Marconi, Carmen S. Menoni, and Jorge J. Rocca

View Full Text Article

Acrobat PDF (593 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

Arrays of nano-dots were demonstrated by multiple exposure interferometric lithography using a table top λ=46.9 nm wavelength laser. Patterns of different geometries with features ~ 60 nm FWHM were printed controlling the exposure dose.

© 2007 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers

Citation
P. W. Wachulak, M. G. Capeluto, M. C. Marconi, C. S. Menoni, and J. J. Rocca, "Arrays of Sub-100 nm Features Fabricated with Table Top Extreme Ultraviolet Interferometric Laser Lithography," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper CThCC3.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2007-CThCC3


Sort:  Journal  |  Reset

References

References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited