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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 6, 2007
ISBN: 1557528349
Fabrication of Periodic Nanostructures (CThW)

Wafer Scale Texturing of LiNbO3

Vijay P. Sivan, Anthony Holland, Lam Bui, Timothy Priest, and Arnan Mitchell

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We report a novel technique for micro texturing of LiNbO3. Well-defined raised ridges and etched trenches are demonstrated. This technique is suitable for the realization of surface relief gratings and photonic crystals.

© 2007 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3730) Integrated optics : Lithium niobate
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication

V. P. Sivan, A. Holland, L. Bui, T. Priest, and A. Mitchell, "Wafer Scale Texturing of LiNbO3," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper CThW3.

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