We report a novel technique for micro texturing of LiNbO3. Well-defined raised ridges and etched trenches are demonstrated. This technique is suitable for the realization of surface relief gratings and photonic crystals.
© 2007 OSA
V. P. Sivan, A. Holland, L. Bui, T. Priest, and A. Mitchell, "Wafer Scale Texturing of LiNbO3," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper CThW3.
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