We report on optical loss reaching 100 dB/cm observed in Si wire waveguides defined by reactive-ion etching in the proximity of metals with a low temperature of silicide formation.
© 2007 OSA
(130.0130) Integrated optics : Integrated optics
(130.2790) Integrated optics : Guided waves
(230.0230) Optical devices : Optical devices
(230.3120) Optical devices : Integrated optics devices
T. Barwicz, C. W. Holzwarth, P. T. Rakich, M. A. Popovic, E. P. Ippen, and H. I. Smith, "Metallic-Contamination-Induced Optical Loss in Silicon Microphotonic Waveguides," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper CTuG5.
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