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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 6, 2007
ISBN: 1557528349
Short Wavelength Generation and Applications (CTuW)

Soft X-Ray Contact Imaging of Thin Films by a Laser Plasma Source

Salvatore Stagira, Francesca Calegari, Enrico Benedetti, Juan Cabanillas-Gonzalez, Mauro Nisoli, Giuseppe Sansone, Gianluca Valentini, Caterina Vozzi, Sandro De Silvestri, Luca Poletto, Paolo Villoresi, Anatoly Faenov, and Tatiana Pikuz

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Quantitative analysis of nanometric films is achieved by soft X-ray imaging using a laser-plasma source and LiF crystals as detectors. Excitation of color center fluorescence in exposed LiF allows image detection with submicron resolution.

© 2007 OSA

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(110.7440) Imaging systems : X-ray imaging
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties

S. Stagira, F. Calegari, E. Benedetti, J. Cabanillas-Gonzalez, M. Nisoli, G. Sansone, G. Valentini, C. Vozzi, S. De Silvestri, L. Poletto, P. Villoresi, A. Faenov, and T. Pikuz, "Soft X-Ray Contact Imaging of Thin Films by a Laser Plasma Source," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper CTuW5.

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