Quantitative analysis of nanometric films is achieved by soft X-ray imaging using a laser-plasma source and LiF crystals as detectors. Excitation of color center fluorescence in exposed LiF allows image detection with submicron resolution.
© 2007 OSA
S. Stagira, F. Calegari, E. Benedetti, J. Cabanillas-Gonzalez, M. Nisoli, G. Sansone, G. Valentini, C. Vozzi, S. De Silvestri, L. Poletto, P. Villoresi, A. Faenov, and T. Pikuz, "Soft X-Ray Contact Imaging of Thin Films by a Laser Plasma Source," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper CTuW5.
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