Ultrafast laser ablation of crystalline silicon was investigated as a function of temperature. The ablation efficiency is slightly enhanced with an apparent decrease in ablation threshold and surface roughness at a high substrate temperature.
© 2007 OSA
J. S. Yahng and S. C. Jeoung, "Temperature Dependence of Ultrafast Laser Ablation Efficiency of Crystalline Silicon," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper JThD92.
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