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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 6, 2007
ISBN: 1557528349
Poster Session III (JThD)

Temperature Dependence of Ultrafast Laser Ablation Efficiency of Crystalline Silicon

Ji Sang Yahng and Sae Chae Jeoung

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Abstract

Ultrafast laser ablation of crystalline silicon was investigated as a function of temperature. The ablation efficiency is slightly enhanced with an apparent decrease in ablation threshold and surface roughness at a high substrate temperature.

© 2007 OSA

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers

Citation
J. S. Yahng and S. C. Jeoung, "Temperature Dependence of Ultrafast Laser Ablation Efficiency of Crystalline Silicon," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper JThD92.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2007-JThD92


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