We demonstrate that the optical characteristics of silicon photonic crystals can be modified by hydrogen annealing. Hydrogen annealed PCs show reduced surface roughness and improved structural uniformity, leading to increased reflectivity and sharper resonance peaks.
© 2008 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.0230) Optical devices : Optical devices
(230.5298) Optical devices : Photonic crystals
S. Kim, R. Kant, S. Hadzialic, R. T. Howe, and O. Solgaard, "Interface Quality Control of Monolithic Photonic Crystals by Hydrogen Annealing," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CFY5.
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