We have realized the first demonstration of imaging in the extreme ultraviolet (EUV) with near-wavelength spatial resolution, 54 nm, using a uniquely compact full-field microscope that can produce images with a single one nanosecond exposure.
© 2008 Optical Society of America
(110.0110) Imaging systems : Imaging systems
(110.7440) Imaging systems : X-ray imaging
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
F. Brizuela, C. A. Brewer, D. Martz, M. C. Marconi, J. J. Rocca, C. S. Menoni, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, A. G. Ponomareko, and V. V. Kondratenko, "Near-Wavelength Resolution Extreme Ultraviolet Imaging with a Desktop-Size Laser," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CMCC7.