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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
Advanced Optical Length Metrology (CMEE)

Picometrology of Ultra-Thin Gold Film by Spinning-Disc Interferometry

Xuefeng Wang and David D. Nolte

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Abstract

We obtain the complex refractive index of ultra-thin gold film (down to 20 picometers) on thermal oxide on silicon by the combination of in-line (IL) and differential-phase-contrast (DPC) channels of spinning-disc interferometry (SDI).

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties

Citation
X. Wang and D. D. Nolte, "Picometrology of Ultra-Thin Gold Film by Spinning-Disc Interferometry," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CMEE6.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2008-CMEE6


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