Laser precision engineering has advantages of non-contact process, flexible setup and high speed processing. Combined with other advanced processing tools, laser nanofabrication will play a much more important role in the next generation manufacturing.
© 2008 Optical Society of America
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3390) Lasers and laser optics : Laser materials processing
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
M. H. Hong, Z. Q. Huang, Y. Lin, J. Yun, L. S. Tan, L. P. Shi, and T. C. Chong, "Laser Precision Engineering: From Microprocessing to Nanofabrication," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CMX1.
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