OSA's Digital Library

Optics InfoBase > Conference Papers > CLEO > 2008 > CMX > Page CMX5 © 2008 OSA

Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
Nano- and Micro-Processing of Materials with Femtosecond Laser Pulses (CMX)

Extreme Ultraviolet Interferometric Lithography with a Desk-Top System

Przemyslaw W. Wachulak, Mario C. Marconi, Willie Rockward, David Hill, Erik H. Anderson, Carmen S. Menoni, and Jorge J. Rocca

View Full Text Article

Acrobat PDF (253 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

We demonstrate an amplitude division interferometer that using illumination from a high brightness desk top extreme ultraviolet (EUV) laser creates large area arrays of lines, holes and dots with sub- 100nm feature size.

© 2008 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(340.0340) X-ray optics : X-ray optics
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(220.4241) Optical design and fabrication : Nanostructure fabrication

Citation
P. W. Wachulak, M. C. Marconi, W. Rockward, D. Hill, E. H. Anderson, C. S. Menoni, and J. J. Rocca, "Extreme Ultraviolet Interferometric Lithography with a Desk-Top System," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CMX5.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2008-CMX5


Sort:  Journal  |  Reset

References

References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited