We propose and demonstrate the digital resonance tuning of high-Q/V<sup>m</sup>silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122 ± 18 pm per hafnium oxide atomic layer is achieved.
© 2008 Optical Society of America
C. Chen, X. Yang, C. Husko, and C. W. Wong, "Digital Resonance Tuning of High-Q/V<sup>m</sup>Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CThCC2.
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