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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
Photonic Crystal High-Q Cavities (CThCC)

Digital Resonance Tuning of High-Q/V<sup>m</sup>Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition

Charlton Chen, Xiaodong Yang, Chad Husko, and Chee Wei Wong

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Abstract

We propose and demonstrate the digital resonance tuning of high-Q/V<sup>m</sup>silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122 ± 18 pm per hafnium oxide atomic layer is achieved.

© 2008 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.5750) Optical devices : Resonators
(230.5298) Optical devices : Photonic crystals

Citation
C. Chen, X. Yang, C. Husko, and C. W. Wong, "Digital Resonance Tuning of High-Q/V<sup>m</sup>Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CThCC2.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2008-CThCC2


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