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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
Photonic Crystal High-Q Cavities (CThCC)

Double-Layered Monolithic Silicon Photonic Crystals

Shrestha Basu Mallick, Sora Kim, Sanja Hadzialic, Aasmund Sudbo, and Olav Solgaard

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Abstract

Double-layered, self-aligned, silicon photonic crystals are fabricated using directional and isotropic etches - a potential step towards 3D PCs. One structure shows sharper resonances compared to corresponding single layer structure. Another shows high, broadband reflectivity.

© 2008 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(230.0230) Optical devices : Optical devices
(230.5298) Optical devices : Photonic crystals
(050.6875) Diffraction and gratings : Three-dimensional fabrication

Citation
S. Basu Mallick, S. Kim, S. Hadzialic, A. Sudbo, and O. Solgaard, "Double-Layered Monolithic Silicon Photonic Crystals," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CThCC7.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2008-CThCC7


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