Double-layered, self-aligned, silicon photonic crystals are fabricated using directional and isotropic etches - a potential step towards 3D PCs. One structure shows sharper resonances compared to corresponding single layer structure. Another shows high, broadband reflectivity.
© 2008 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(230.0230) Optical devices : Optical devices
(230.5298) Optical devices : Photonic crystals
(050.6875) Diffraction and gratings : Three-dimensional fabrication
S. Basu Mallick, S. Kim, S. Hadzialic, A. Sudbo, and O. Solgaard, "Double-Layered Monolithic Silicon Photonic Crystals," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CThCC7.
References are not available for this paper.