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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CThN6

Laser Terahertz Emission Microscopy toward High-Resolution Imaging

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Abstract

As an unique terahertz application, we have been developing a laser terahertz emission microscope (LTEM) for not only a study of basic science but also industrial application such as an inspection tool for semiconductor integrated circuits. In order to establish high resolution system, we employed a high-refractive solid immersion lens and a beam expander in LTEM system, by which a focused beam spot size can be minimized effectively. Using the modified LTEM, nondestructive terahertz emission images of samples patterned as line-and-space structure on InP was obtained with a spatial resolution better than 1.5 µm.

© 2008 Optical Society of America

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