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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CThT3

Low Loss Si-SiO2-Si 8nm Slot Waveguides

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Abstract

Quasi-TM-mode propagation loss of 1.83dB/cm at λ = 1.565 µm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ~ 3×105.

© 2008 Optical Society of America

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