Epitaxially grown Nd(0.5%):(Gd,Lu)<sup>2</sup>O<sup>3</sup>and Er(0.6%):(Gd,Lu)<sup>2</sup>O<sup>3</sup>waveguides deposited on Y<sup>2</sup>O<sup>3</sup>by Pulsed Laser Deposition, providing peak emission cross sections comparable with those of Lu<sup>2</sup>O<sup>3</sup>bulk crystals, have been fabricated and structured. Rib waveguiding has been shown.
© 2008 Optical Society of America
A. Kahn, T. Gün, B. Ileri, H. Kühn, K. Petermann, G. Huber, J. Bradley, F. Ay, K. Wörhoff, M. Pollnau, Y. Luo, and P. Hoffmann, "Mono-Crystalline Rare Earth Doped (Gd,Lu)<sup>2</sup>O<sup>3</sup>Waveguiding Films Produced by Pulsed Laser Deposition and Structured by Reactive Ion Etching," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CTuS1.
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