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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
Waveguide Devices (CTuS)

Mono-Crystalline Rare Earth Doped (Gd,Lu)<sup>2</sup>O<sup>3</sup>Waveguiding Films Produced by Pulsed Laser Deposition and Structured by Reactive Ion Etching

Andreas Kahn, Teoman Gün, Bilge Ileri, Henning Kühn, Klaus Petermann, Günter Huber, Jonathan Bradley, Feridun Ay, Kerstin Wörhoff, Markus Pollnau, Yun Luo, and Patrik Hoffmann

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Epitaxially grown Nd(0.5%):(Gd,Lu)<sup>2</sup>O<sup>3</sup>and Er(0.6%):(Gd,Lu)<sup>2</sup>O<sup>3</sup>waveguides deposited on Y<sup>2</sup>O<sup>3</sup>by Pulsed Laser Deposition, providing peak emission cross sections comparable with those of Lu<sup>2</sup>O<sup>3</sup>bulk crystals, have been fabricated and structured. Rib waveguiding has been shown.

© 2008 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.7380) Optical devices : Waveguides, channeled
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication

A. Kahn, T. Gün, B. Ileri, H. Kühn, K. Petermann, G. Huber, J. Bradley, F. Ay, K. Wörhoff, M. Pollnau, Y. Luo, and P. Hoffmann, "Mono-Crystalline Rare Earth Doped (Gd,Lu)<sup>2</sup>O<sup>3</sup>Waveguiding Films Produced by Pulsed Laser Deposition and Structured by Reactive Ion Etching," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CTuS1.

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