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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
Nonlinear Effects in Nanophotonic Structures (CTuT)

Nonlinear Optics in Silicon Nitride Waveguide Device on Silicon Chip

Kazuhiro Ikeda, Robert Saperstein, Nikola Alic, and Yeshaiahu Fainman

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Abstract

Silicon nitride /silicon dioxide waveguide using plasma-enhanced chemical vapor deposition is reported, which has the loss of ~4dB/cm. A ring resonator using the waveguide gives the Q of 12,900 and its nonlinear response is studied.

© 2008 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3130) Integrated optics : Integrated optics materials
(130.3990) Integrated optics : Micro-optical devices

Citation
K. Ikeda, R. Saperstein, N. Alic, and Y. Fainman, "Nonlinear Optics in Silicon Nitride Waveguide Device on Silicon Chip," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CTuT5.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2008-CTuT5


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