Silicon nitride /silicon dioxide waveguide using plasma-enhanced chemical vapor deposition is reported, which has the loss of ~4dB/cm. A ring resonator using the waveguide gives the Q of 12,900 and its nonlinear response is studied.
© 2008 Optical Society of America
K. Ikeda, R. Saperstein, N. Alic, and Y. Fainman, "Nonlinear Optics in Silicon Nitride Waveguide Device on Silicon Chip," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CTuT5.
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