We realize a variety of silicon photonic crystal structures. Direct laser writing of polymeric templates (square/circular spirals and slanted pore structures) combined with a silicon single-inversion procedure leads to band gaps in the near infrared.
© 2008 Optical Society of America
M. Hermatschweiler, M. Thiel, M. Wegener, and G. von Freymann, "Three-Dimensional Photonic Band Gap Structures Made by Direct Laser Writing and Silicon Single-Inversion," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CWO5.
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