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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
3-D Structuring of Photonic Crystals (CWO)

Three-Dimensional Photonic Band Gap Structures Made by Direct Laser Writing and Silicon Single-Inversion

Martin Hermatschweiler, Michael Thiel, Martin Wegener, and Georg von Freymann

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We realize a variety of silicon photonic crystal structures. Direct laser writing of polymeric templates (square/circular spirals and slanted pore structures) combined with a silicon single-inversion procedure leads to band gaps in the near infrared.

© 2008 Optical Society of America

OCIS Codes
(160.0160) Materials : Materials
(160.5293) Materials : Photonic bandgap materials
(160.5298) Materials : Photonic crystals

M. Hermatschweiler, M. Thiel, M. Wegener, and G. von Freymann, "Three-Dimensional Photonic Band Gap Structures Made by Direct Laser Writing and Silicon Single-Inversion," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CWO5.

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