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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
CLEO/QELS Poster Session III (JThA)

Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates

Hongjun Yang, Zexuan Qiang, Huiqing Pang, Zhenqiang Ma, Weidong Zhou, Mingyu Lu, and Richard A. Soref

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Abstract

Surface-normal optical filters based on Fano resonance were demonstrated in patterned single crystalline silicon nanomembranes on glass. Measured transmission agrees well with the design. High Q filters are feasible with design and process optimizations.

© 2008 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.0230) Optical devices : Optical devices
(230.7408) Optical devices : Wavelength filtering devices

Citation
H. Yang, Z. Qiang, H. Pang, Z. Ma, W. Zhou, M. Lu, and R. A. Soref, "Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JThA87.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2008-JThA87


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