Surface-normal optical filters based on Fano resonance were demonstrated in patterned single crystalline silicon nanomembranes on glass. Measured transmission agrees well with the design. High Q filters are feasible with design and process optimizations.
© 2008 Optical Society of America
H. Yang, Z. Qiang, H. Pang, Z. Ma, W. Zhou, M. Lu, and R. A. Soref, "Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JThA87.
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