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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
CLEO/QELS Poster Session II (JWA)

Analysis of Resolution and Feature Size in Extreme Ultraviolet Microscopy Images

Mario C. Marconi, Przemyslaw W. Wachulak, Courtney A. Brewer, Fernando Brizuela, Randy Bartels, Carmen S. Menoni, Jorge J. Rocca, Erik H. Anderson, and Weilun Chao

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Abstract

We describe a correlation algorithm that allows for the simultaneous determination of object size and resolution in images of nanoscale objects. The method was used to analyze images recorded with a 13.2 nm laser.

© 2008 Optical Society of America

OCIS Codes
(100.0100) Image processing : Image processing
(100.2960) Image processing : Image analysis
(110.0110) Imaging systems : Imaging systems
(110.7440) Imaging systems : X-ray imaging

Citation
M. C. Marconi, P. W. Wachulak, C. A. Brewer, F. Brizuela, R. Bartels, C. S. Menoni, J. J. Rocca, E. H. Anderson, and W. Chao, "Analysis of Resolution and Feature Size in Extreme Ultraviolet Microscopy Images," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JWA80.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2008-JWA80


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