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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CFF3
  • https://doi.org/10.1364/CLEO.2009.CFF3

High Q Silicon Nitride Photonic Cavities

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Abstract

We demonstrate high confinement, low loss silicon nitride ring resonators with intrinsic Q of 4,000,000 in the telecommunication C-band. We measure the scattering and absorption losses to be below .08dB/cm and .02dB/cm, respectively.

© 2009 Optical Society of America

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