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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 31, 2009 - June 5, 2009
ISBN: 978-1-55752-869-8
Silicon Photonics (CFF)

High Q Silicon Nitride Photonic Cavities

Alexander Gondarenko, Jacob Levy, and Michal Lipson


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We demonstrate high confinement, low loss silicon nitride ring resonators with intrinsic Q of 4,000,000 in the telecommunication C-band. We measure the scattering and absorption losses to be below .08dB/cm and .02dB/cm, respectively.

© 2009 The Optical Society

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3945) Lasers and laser optics : Microcavities

A. Gondarenko, J. Levy, and M. Lipson, "High Q Silicon Nitride Photonic Cavities," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CFF3.

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