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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 31, 2009 - June 5, 2009
ISBN: 978-1-55752-869-8
Light Emission in Novel Nano-Structures and Materials (CMD)

All Planar Integration of High-Q, Er-Doped Silicon-Rich Silicon Nitride Microdisk with SU-8 Waveguide for On-Chip, Si-Based Light Source

Jee Soo Chang, Seokchan Eom, Gun Yong Sung, and Jung H. Shin

http://dx.doi.org/10.1364/CLEO.2009.CMD3


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Abstract

All-planar integration of a light source coupled WG on Si chip is achieved using SRN:Er microdisks and SU8 WG. High Q, sharp Er<sup>3+</sup>WGM emission indicates the promise of SRN:Er for compact,Si- based light source.

© 2009 The Optical Society

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(230.0230) Optical devices : Optical devices
(140.3945) Lasers and laser optics : Microcavities
(230.4555) Optical devices : Coupled resonators

Citation
J. S. Chang, S. Eom, G. Y. Sung, and J. H. Shin, "All Planar Integration of High-Q, Er-Doped Silicon-Rich Silicon Nitride Microdisk with SU-8 Waveguide for On-Chip, Si-Based Light Source," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CMD3.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2009-CMD3


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