Integration of silicon microresonators with metallic micro-heaters optimized for low power consumption and fast reconfigurability is experimentally demonstrated. It is shown that narrower heaters improve the performance and also LPCVD SiN over-cladding enhances tuning speed.
© 2009 The Optical Society
A. H. Atabaki, M. Soltani, S. Yegnanarayanan, A. A. Eftekhar, and A. Adibi, "Optimization of Metallic Micro-Heaters for Reconfigurable Silicon Photonics," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CThB4.
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