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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 31, 2009 - June 5, 2009
ISBN: 978-1-55752-869-8
Novel Devices and Techniques (CThB)

Optimization of Metallic Micro-Heaters for Reconfigurable Silicon Photonics

Amir H. Atabaki, Mohammad Soltani, Siva Yegnanarayanan, Ali A. Eftekhar, and Ali Adibi


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Integration of silicon microresonators with metallic micro-heaters optimized for low power consumption and fast reconfigurability is experimentally demonstrated. It is shown that narrower heaters improve the performance and also LPCVD SiN over-cladding enhances tuning speed.

© 2009 The Optical Society

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(160.0160) Materials : Materials
(160.6840) Materials : Thermo-optical materials

A. H. Atabaki, M. Soltani, S. Yegnanarayanan, A. A. Eftekhar, and A. Adibi, "Optimization of Metallic Micro-Heaters for Reconfigurable Silicon Photonics," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CThB4.

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