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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 31, 2009 - June 5, 2009
ISBN: 978-1-55752-869-8
Novel 2-D and 3-D Microscopy (CTuAA)

High-Precision Contouring of Rapidly Oscillating Optical Surfaces with Two-Wavelength Single-Shot Digital Holography

Thomas Hansel, Günter Steinmeyer, Klaus Reimann, Ruediger Grunwald, and Uwe Griebner

http://dx.doi.org/10.1364/CLEO.2009.CTuAA1


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Abstract

A novel method for contouring of optical surfaces with unprecedented dynamic range is presented. At an object depth >50 µm, surface deformations of a MEMS of some 10 nm are still unambiguously detectable.

© 2009 The Optical Society

OCIS Codes
(090.0090) Holography : Holography
(090.4220) Holography : Multiplex holography
(090.1995) Holography : Digital holography

Citation
T. Hansel, G. Steinmeyer, K. Reimann, R. Grunwald, and U. Griebner, "High-Precision Contouring of Rapidly Oscillating Optical Surfaces with Two-Wavelength Single-Shot Digital Holography," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CTuAA1.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2009-CTuAA1


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