A novel method for contouring of optical surfaces with unprecedented dynamic range is presented. At an object depth >50 µm, surface deformations of a MEMS of some 10 nm are still unambiguously detectable.
© 2009 The Optical Society
T. Hansel, G. Steinmeyer, K. Reimann, R. Grunwald, and U. Griebner, "High-Precision Contouring of Rapidly Oscillating Optical Surfaces with Two-Wavelength Single-Shot Digital Holography," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CTuAA1.
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