Imaging interferometric microscopy resolution to λ/2(n<sup>sub</sup>+1) (n<sup>sub</sup> <sup/>= substrate refractive index) is demonstrated using evanescent-wave illumination. Resolution to 150 nm (λ/4.2) is achieved using a 633 nm source and a 0.4 NA lens.
© 2009 The Optical Society
Y. V. Kuznetsova, A. Neumann, and S. r. j. Brueck, "Imaging Interferometric Nanoscopy to the Limit of Available Frequency Space," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CTuAA5.
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