Experiments and modeling reveal that the dielectric breakdown of hafnia films is controlled by laser induced and native defects under multiple femtosecond pulse exposure. Transient processes occur on a 100 ps and 10 ms timescale.
© 2009 The Optical Society
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3440) Lasers and laser optics : Laser-induced breakdown
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties
L. A. Emmert, D. Nguyen, M. Mero, W. Rudolph, D. Patel, E. Krous, and C. S. Menoni, "The Role of Native and Transient Laser-Induced Defects in the Femtosecond Breakdown of Dielectric Films," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CTuEE5.
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