We integrated monolithically vertical p-i-n Ge photodetectors with variable optical attenuators (VOAs) based on Si wire rib waveguides. The Ge photodetector accurately detected the change in light power due to the Si-VOA.
© 2009 The Optical Society
(130.0130) Integrated optics : Integrated optics
(230.0230) Optical devices : Optical devices
(230.3120) Optical devices : Integrated optics devices
(130.3990) Integrated optics : Micro-optical devices
T. Tsuchizawa, K. Yamada, T. Watanabe, H. Shinojima, H. Nishi, S. Itabashi, S. Park, Y. Ishikawa, and K. Wada, "Monolithic Integration of Germanium Photodetectors and Silicon Wire Waveguides with Carrier Injection Structures," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CTuV2.
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