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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 31, 2009 - June 5, 2009
ISBN: 978-1-55752-869-8
Photodetectors and Modulators (CTuV)

Monolithic Integration of Germanium Photodetectors and Silicon Wire Waveguides with Carrier Injection Structures

Tai Tsuchizawa, Koji Yamada, Toshifumi Watanabe, Hiroyuki Shinojima, Hidetaka Nishi, Seiichi Itabashi, Sungbong Park, Yasuhiko Ishikawa, and Kazumi Wada


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We integrated monolithically vertical p-i-n Ge photodetectors with variable optical attenuators (VOAs) based on Si wire rib waveguides. The Ge photodetector accurately detected the change in light power due to the Si-VOA.

© 2009 The Optical Society

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.0230) Optical devices : Optical devices
(230.3120) Optical devices : Integrated optics devices
(130.3990) Integrated optics : Micro-optical devices

T. Tsuchizawa, K. Yamada, T. Watanabe, H. Shinojima, H. Nishi, S. Itabashi, S. Park, Y. Ishikawa, and K. Wada, "Monolithic Integration of Germanium Photodetectors and Silicon Wire Waveguides with Carrier Injection Structures," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CTuV2.

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