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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 31, 2009 - June 5, 2009
ISBN: 978-1-55752-869-8
Joint CLEO Poster Session III (JThE)

Spin-Coating of Ge<sup>23</sup>Sb<sup>7</sup>S<sup>70</sup>Chalcogenide Glass Thin Films

Shanshan Song, Nathan Carlie, Laeticia Petit, Kathleen Richardson, and Craig B. Arnold

http://dx.doi.org/10.1364/CLEO.2009.JThE41


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Abstract

We demonstrate a spin-coating technique for the deposition of Ge<sup>23</sup>Sb<sup>7</sup>S<sup>70</sup>chalcogenide glass films. We show that the use of the amine-based solvent allows the deposition of stoichiometric films with low surface roughness and controlled thickness.

© 2009 The Optical Society

OCIS Codes
(160.0160) Materials : Materials
(160.4670) Materials : Optical materials
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication

Citation
S. Song, N. Carlie, L. Petit, K. Richardson, and C. B. Arnold, "Spin-Coating of Ge<sup>23</sup>Sb<sup>7</sup>S<sup>70</sup>Chalcogenide Glass Thin Films," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper JThE41.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2009-JThE41


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