Design of a simple doubly clamped cantilever structure capable of localizing mechanical and optical energy at the nanoscale is presented. Current designs for thin-film SiNx indicate that an optical Q-factor greater than 10<sup>6</sup>is realizable.
© 2009 The Optical Society
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(130.0130) Integrated optics : Integrated optics
(130.5296) Integrated optics : Photonic crystal waveguides
(120.4880) Instrumentation, measurement, and metrology : Optomechanics
J. Chan, M. Eichenfield, R. Camacho, and O. Painter, "Optical and Mechanical Design of a “Zipper” Photonic Crystal Optomechanical Cavity," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper JThE93.
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