A wafer-scale (~4 inch) 100 nm nano-checkerboard structure was fabricated. The fabrication combines multiple nanoimprint lithography, 3-D patterning and self-aligned etching. Transmission/reflection resonance at ~750 nm and Raman enhancement of ~ 4.5E6 were achieved.
© 2010 The Optical Society
(220.0220) Optical design and fabrication : Optical design and fabrication
(240.0240) Optics at surfaces : Optics at surfaces
(220.4241) Optical design and fabrication : Nanostructure fabrication
(240.6695) Optics at surfaces : Surface-enhanced Raman scattering
W. Li, C. Wang, and S. Y. Chou, "100 nm Metallic Checkerboard by Wafer-scale Nanoimprint and Its Application in Surface Enhanced Raman Spectroscopy," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CFB5.
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