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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 16-21, 2010
ISBN: 978-1-55752-889-6
Metamaterial Devices (CFB)

100 nm Metallic Checkerboard by Wafer-scale Nanoimprint and Its Application in Surface Enhanced Raman Spectroscopy

Wen-Di Li, Chao Wang, and Stephen Y. Chou

http://dx.doi.org/10.1364/CLEO.2010.CFB5


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Abstract

A wafer-scale (~4 inch) 100 nm nano-checkerboard structure was fabricated. The fabrication combines multiple nanoimprint lithography, 3-D patterning and self-aligned etching. Transmission/reflection resonance at ~750 nm and Raman enhancement of ~ 4.5E6 were achieved.

© 2010 The Optical Society

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(240.0240) Optics at surfaces : Optics at surfaces
(220.4241) Optical design and fabrication : Nanostructure fabrication
(240.6695) Optics at surfaces : Surface-enhanced Raman scattering

Citation
W. Li, C. Wang, and S. Y. Chou, "100 nm Metallic Checkerboard by Wafer-scale Nanoimprint and Its Application in Surface Enhanced Raman Spectroscopy," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CFB5.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2010-CFB5


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