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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 16-21, 2010
ISBN: 978-1-55752-889-6
Advanced Concepts in Photovoltaics (CMAA)

Thin Film Silicon Solar Cell Fabricated at 100<sup>o</sup>C by High Density Plasma for Flexible Photovoltaic Application

Chang-Hong Shen, Jia-Min Shieh, Hao-Chung Kuo, Jung Y. Huang, Wen-Chien Yu, Wen-Hsien Huang, Chao-Kei Wang, Chih-Wei Hsu, Yu-Hsin Lin, Hung-Yu Chiu, Bau-Tong Dai, and Fu-Liang Yang

http://dx.doi.org/10.1364/CLEO.2010.CMAA1


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Abstract

Record fabrication temperature, 100<sup>o</sup>C, of a single junction amorphous Si solar cell was demonstrated by a high-density plasma method. Present solar cell revealed conversion efficiency of 7.4% at 200<sup>o</sup>C (4.1% at 135<sup>o</sup>C).

© 2010 The Optical Society

OCIS Codes
(040.0040) Detectors : Detectors
(040.5350) Detectors : Photovoltaic
(350.0350) Other areas of optics : Other areas of optics
(350.6050) Other areas of optics : Solar energy

Citation
C. Shen, J. Shieh, H. Kuo, J. Y. Huang, W. Yu, W. Huang, C. Wang, C. Hsu, Y. Lin, H. Chiu, B. Dai, and F. Yang, "Thin Film Silicon Solar Cell Fabricated at 100<sup>o</sup>C by High Density Plasma for Flexible Photovoltaic Application," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CMAA1.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2010-CMAA1


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