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Conferences > CLEO > 2010 > CMBB > CMBB2

Adaptive optics for direct writing in three-dimensional nano-fabrication

Alexander Jesacher, Richard Simmonds, Tony Wilson, and Martin J. Booth

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Abstract

Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. We develop adaptive optics to correct aberrations and demonstrate improved fabrication depth in several substrates.

© 2010 Optical Society of America

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