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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 16-21, 2010
ISBN: 978-1-55752-889-6
Passive and Active Resonators (CMI)

High-Q Polymeric Microcavities

Mario Hauser, Tobias Grossmann, Simone Schleede, Julian Fischer, Torsten Beck, Christoph Vannahme, Timo Mappes, and Heinz Kalt


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We report on the fabrication of high-Q microresonators made of poly(methyl methacrylate) (PMMA) with a conical shape due to a thermal reflow step. The quality factor is above 2x10<sup>6</sup>in the 1300 nm wavelength range.

© 2010 The Optical Society

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(130.3990) Integrated optics : Micro-optical devices

M. Hauser, T. Grossmann, S. Schleede, J. Fischer, T. Beck, C. Vannahme, T. Mappes, and H. Kalt, "High-Q Polymeric Microcavities," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CMI5.

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