We report on the fabrication of high-Q microresonators made of poly(methyl methacrylate) (PMMA) with a conical shape due to a thermal reflow step. The quality factor is above 2x10<sup>6</sup>in the 1300 nm wavelength range.
© 2010 The Optical Society
(130.0130) Integrated optics : Integrated optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(130.3990) Integrated optics : Micro-optical devices
M. Hauser, T. Grossmann, S. Schleede, J. Fischer, T. Beck, C. Vannahme, T. Mappes, and H. Kalt, "High-Q Polymeric Microcavities," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CMI5.
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