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Conferences > CLEO > 2010 > CMQ > CMQ1

Oxidized Silicon-On-Insulator (OxSOI) from Bulk Silicon: a New Photonic Platform

Nicolás Sherwood-Droz, Alexander Gondarenko, and Michal Lipson

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Abstract

We demonstrate a bulk silicon alternative to SOI, using Si3N4 masking and oxidation techniques. We show waveguide losses of 2.92 dB/cm with a process compatible with the front-end of a typical CMOS fabrication line.

© 2010 Optical Society of America

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