InP-based square-lattice photonic crystal laser with a single air-hole defect was fabricated by a combined lithography of laser holography and focused ion beam, which enables the large scale and high throughput fabrication of PC-based devices.
© 2010 The Optical Society
(220.0220) Optical design and fabrication : Optical design and fabrication
(350.0350) Other areas of optics : Other areas of optics
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(220.4241) Optical design and fabrication : Nanostructure fabrication
S. Ahn, S. Kim, and H. Jeon, "Single-Defect Photonic Crystal Cavity Laser Fabricated by a Combined Lithography of Laser Holography and Focused Ion Beam," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CThV5.