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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 16-21, 2010
ISBN: 978-1-55752-889-6
Joint CLEO/QELS Poster Session I (JTuD)

Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

Mahadi Halim, Amin Abdolvand, Yongchang Fan, Saydulla Persheyev, Charles Main, Edik Rafailov, and Mervyn Rose

http://dx.doi.org/10.1364/CLEO.2010.JTuD17


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Abstract

We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

© 2010 The Optical Society

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3390) Lasers and laser optics : Laser materials processing
(350.0350) Other areas of optics : Other areas of optics
(350.3850) Other areas of optics : Materials processing

Citation
M. Halim, A. Abdolvand, Y. Fan, S. Persheyev, C. Main, E. Rafailov, and M. Rose, "Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optical Society of America, 2010), paper JTuD17.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2010-JTuD17


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