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Conferences > CLEO > 2010 > JTuD > JTuD17

Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

M. M. Halim, A. Abdolvand, Y. Fan, S. K. Persheyev, C. Main, E. U. Rafailov, and M. J. Rose

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Abstract

We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

© 2010 Optical Society of America

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