Ultra-high-Q nanocavity resonance tuning by laser-assisted thermal oxidation of silicon is demonstrated by using a 532 nm continuous wave laser. The resonance is blue-shifted by >2nm. The quality factor remains >200,000.
© 2011 OSA
J. Zheng, C. J. Chen, J. F. McMillan, M. Yu, G. Lo, D. Kwong, and C. W. Wong, "Selective Tuning of Silicon Photonic Crystal Cavities via Laser-Assisted Local Oxidation," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper AMA3.
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