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Conference Paper
CLEO: Applications and Technology
Baltimore, Maryland United States
May 1-6, 2011
ISBN: 978-1-55752-910-7
Fundamentals of Laser Processing for Adding, Modifying, and Joining Materials (AMA)

Selective Tuning of Silicon Photonic Crystal Cavities via Laser-Assisted Local Oxidation

Jiangjun Zheng, Charlton J. Chen, James F. McMillan, Mingbin Yu, Guo-Qiang Lo, Dim-Lee Kwong, and Chee Wei Wong  »View Author Affiliations


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Ultra-high-Q nanocavity resonance tuning by laser-assisted thermal oxidation of silicon is demonstrated by using a 532 nm continuous wave laser. The resonance is blue-shifted by >2nm. The quality factor remains >200,000.

© 2011 OSA

OCIS Codes
(140.3945) Lasers and laser optics : Microcavities
(130.5296) Integrated optics : Photonic crystal waveguides
(230.5298) Optical devices : Photonic crystals

J. Zheng, C. J. Chen, J. F. McMillan, M. Yu, G. Lo, D. Kwong, and C. W. Wong, "Selective Tuning of Silicon Photonic Crystal Cavities via Laser-Assisted Local Oxidation," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper AMA3.

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