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Conference Paper
CLEO: Applications and Technology
San Jose, California United States
May 6-11, 2012
ISBN: 978-1-55752-943-5
Laser Micro Processing (ATu3L)

Laser Fabrication of Non-Tapered Deep Micro Holes: Strategies and Working Tools

David Ashkenasi, Norbert Mueller, Andreas Lemke, Tristan Kaszemeikat, Matthias Schmidt, Daniel Jahns, and Hans Joachim Eichler  »View Author Affiliations


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The implementation of laser processing strategies and working tools for micro cylindrical drilling at high aspect ratio is demonstrated for glasses, ceramics and metals. Laser parameters vary in wavelength, pulse width and pulse energy.

© 2012 OSA

OCIS Codes
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(140.3390) Lasers and laser optics : Laser materials processing
(350.3850) Other areas of optics : Materials processing

D. Ashkenasi, N. Mueller, A. Lemke, T. Kaszemeikat, M. Schmidt, D. Jahns, and H. J. Eichler, "Laser Fabrication of Non-Tapered Deep Micro Holes: Strategies and Working Tools," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper ATu3L.4.

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