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Conference Paper
CLEO: Science and Innovations
San Jose, California United States
May 6-11, 2012
ISBN: 978-1-55752-943-5
Dynamics of Laser-Matter Interactions (CM3L)

Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry

Ilya Kuznetsov, Jorge Filevich, Feng Dong, Weilun Chao, Erik Anderson, Elliot Bernstein, Dean Crick, Jorge Rocca, and Carmen Menoni  »View Author Affiliations


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We demonstrate a novel mass spectrometry nanoprobe that uses soft x-ray laser ablation to map chemical composition. Composition maps of metal/dielectric/polymer samples with 250nm surface and 50nm depth resolution were obtained.

© 2012 OSA

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(260.5210) Physical optics : Photoionization

I. Kuznetsov, J. Filevich, F. Dong, W. Chao, E. Anderson, E. Bernstein, D. Crick, J. Rocca, and C. Menoni, "Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CM3L.3.

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