We demonstrate a novel mass spectrometry nanoprobe that uses soft x-ray laser ablation to map chemical composition. Composition maps of metal/dielectric/polymer samples with 250nm surface and 50nm depth resolution were obtained.
© 2012 OSA
I. Kuznetsov, J. Filevich, F. Dong, W. Chao, E. Anderson, E. Bernstein, D. Crick, J. Rocca, and C. Menoni, "Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CM3L.3.
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