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Conference Paper
CLEO: Applications and Technology
Baltimore, Maryland United States
May 1-6, 2011
ISBN: 978-1-55752-910-7
Towards Applications Joint Poster Session (JWA)

Fabrication and Optical Properties of Aligned Silicon Nanowire Arrays Realized with Thin Silver Film

Yung-Jr Hung, Kai-Chung Wu, San-Liang Lee, and Yen-Ting Pan  »View Author Affiliations


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Silicon nanowire arrays realized by depositing thin silver film before etching are demonstrated to have good material and optical properties. They can provide <0.4% antireflection over >1400-nm wavelength range for large-area silicon samples.

© 2011 OSA

OCIS Codes
(160.4670) Materials : Optical materials
(220.4241) Optical design and fabrication : Nanostructure fabrication

Y. Hung, K. Wu, S. Lee, and Y. Pan, "Fabrication and Optical Properties of Aligned Silicon Nanowire Arrays Realized with Thin Silver Film," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWA72.

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