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Optics InfoBase > Conference Papers > CLEO_AT > 2013 > ATu2N > Page ATu2N.2 © 2013 OSA

Conference Paper
CLEO: Applications and Technology
San Jose, California United States
June 9-14, 2013
ISBN: 978-1-55752-972-5
Micro and Nanofabrication (ATu2N)

Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers

Yves Bellouard  »View Author Affiliations


http://dx.doi.org/10.1364/CLEO_AT.2013.ATu2N.2


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Abstract

Non-linear laser-matter interaction offers the possibility to structure transparent material in three dimensions. Here, we demonstrate that such process can be implemented for fabricating novel type of microsystems, including actuators transparent to visible light.

© 2013 OSA

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(350.3850) Other areas of optics : Materials processing
(120.4880) Instrumentation, measurement, and metrology : Optomechanics

Citation
Y. Bellouard, "Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers," in CLEO: 2013, OSA Technical Digest (online) (Optical Society of America, 2013), paper ATu2N.2.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO_AT-2013-ATu2N.2

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