Abstract

Optically driven microfluidic devices such as micropumps, microvalves and microtweezers have been developed by two-photon microfabrication. To improve the driving efficiency of the microfluidic devices, metalized micromachines driven by light have been developed by the combination of two-photon microfabrication and electroless plating. The optically controlled micro/nano fluidic devices will be used for low-cost, functional lab-on-a-chip.

© 2014 Optical Society of America