We present a fast and precise 3-D measurement of microelectronic step-structures over a wide field-of-view by utilizing high spatial coherence, low temporal coherence and repetition rate tunablility of femtosecond laser pulses
© 2014 OSA
Y. Kim, W. Joo, J. Park, S. Kim, and S. Kim, "Femtosecond pulses for 3-D surface measurement of microelectronic step-structures," in CLEO: 2014, OSA Technical Digest (online) (Optical Society of America, 2014), paper AW3H.5.
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