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Conference Paper
CLEO: Applications and Technology
San Jose, California United States
June 8-13, 2014
High Performance Optical Measurement (AW3H)

Femtosecond pulses for 3-D surface measurement of microelectronic step-structures

Young-Jin Kim, Woo-Deok Joo, Jiyong Park, Seungman Kim, and Seung-Woo Kim  »View Author Affiliations


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We present a fast and precise 3-D measurement of microelectronic step-structures over a wide field-of-view by utilizing high spatial coherence, low temporal coherence and repetition rate tunablility of femtosecond laser pulses

© 2014 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(140.4050) Lasers and laser optics : Mode-locked lasers
(140.7090) Lasers and laser optics : Ultrafast lasers

Y. Kim, W. Joo, J. Park, S. Kim, and S. Kim, "Femtosecond pulses for 3-D surface measurement of microelectronic step-structures," in CLEO: 2014, OSA Technical Digest (online) (Optical Society of America, 2014), paper AW3H.5.

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