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Self-organized Nonadiabatic Optical Near-field Assisted Sputtering for Repairing Surface Scratches on Al2O3 Ceramic Substrate

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Abstract

The scratches on the surface of Al2O3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.

© 2010 Optical Society of America

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