Abstract
The design, simulation, optimization and experimental demonstration of an electro-optic SiO2-CBN-MgO rib waveguide structure are reported in this paper. The proposed structure is modeled and optimized by simulations. CBN thin film is deposited epitaxially by a pulsed laser deposition technique. The CBN rib waveguide structure is patterned using plasma etching. The fabricated waveguides are characterized and the measured wave profiles are compared with simulated results. The agreement between simulation and experiment is found remarkably good, thus validating our design approach.
© 2014 Optical Society of America
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