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Conference Paper
CLEO: Science and Innovations
Baltimore, Maryland United States
May 1-6, 2011
ISBN: 978-1-55752-910-7
Optomechanics I (CThJ)

Cavity optomechanical sensors for atomic force microscopy

Kartik Srinivasan, Houxun Miao, Matthew Rakher, Marcelo Davanco, and Vladimir Aksyuk  »View Author Affiliations


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We develop a Si cavity optomechanical sensor for atomic force microscopy through near-field coupling between a nanocantilever and microdisk cavity. The device exhibits sub-fm/√Hz displacement sensitivity, GHz bandwidth, and >60 dB of dynamic range.

© 2011 OSA

OCIS Codes
(140.3948) Lasers and laser optics : Microcavity devices
(230.4685) Optical devices : Optical microelectromechanical devices

K. Srinivasan, H. Miao, M. Rakher, M. Davanco, and V. Aksyuk, "Cavity optomechanical sensors for atomic force microscopy," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper CThJ2.

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