We develop a Si cavity optomechanical sensor for atomic force microscopy through near-field coupling between a nanocantilever and microdisk cavity. The device exhibits sub-fm/√Hz displacement sensitivity, GHz bandwidth, and >60 dB of dynamic range.
© 2011 OSA
K. Srinivasan, H. Miao, M. Rakher, M. Davanco, and V. Aksyuk, "Cavity optomechanical sensors for atomic force microscopy," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper CThJ2.
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