We demonstrate nanophotonic circuits for integration of high Q micromechanical resonators and nanooptical components. Mechanical resonance of nanostring is actuated and readout by optomechanical interaction. Quality factor up to 696,000 is obtained.
© 2011 OSA
K. Y. Fong, W. H. Pernice, M. Li, and H. Tang, "High Q optomechanical resonators in silicon nitride nanophotonic circuits," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper CThJ5.
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