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Conferences > CLEO_SI > 2011 > CTuH > CTuH3

Sub-30nm Spatial Resolution Imaging Using a Tabletop 13nm High Harmonic Source

Matthew D. Seaberg, Daniel E. Adams, William F. Schlotter, Yanwei Liu, Carmen Menoni, Margaret Murnane, and Henry Kapteyn

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Abstract

We report the highest spatial resolution (<30nm) imaging to-date using a tabletop x-ray microscope in any imaging modality. High-harmonic light at 13nm illuminates an object, with images retrieved by iterative phase retrieval of the scatter pattern.

© 2011 Optical Society of America

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